Deputy Prime Minister Teo Chee Hean paid a visit to E6NanoFab at NUS Engineering on 20 March. He was joined by NUS President Professor Tan Eng Chye; Professor Chen Tsuhan, NUS Deputy President (Research and Technology); as well as representatives from the National Research Foundation and NUS Engineering.
During the visit, Director of E6NanoFab Professor Aaron Thean gave Mr Teo an overview of the state-of-the-art cleanroom facilities and advanced process and material characterisation capabilities offered by the nanofabrication facility. The equipment facilitates a wide-range of advanced research in nanotechnology, flexible electronics, spintronics, quantum and semiconductor technologies.
Prof Thean, who is also Director of the Hybrid Integrated Flexible Electronic Systems (HiFES) programme and Co-director of the Applied Materials-NUS Advanced Materials Corporate Lab (AMAT-NUS Advanced Materials Corporate Lab) subsequently shared with DPM Teo the current projects and research progress under the programme and at the laboratory. Hosted in E6NanoFab, the HiFES programme seeks to spearhead innovations in hybrid flexible electronics while the AMAT-NUS Advanced Materials Corporate Lab aims to accelerate the discovery and commercialisation of new materials for manufacturing next-generation semiconductors.
In a tour of the facility, Mr Teo visited a cleanroom that houses advanced atomic layer processing equipment essential for the production of next-generation semiconductor electronics and was given a demonstration of how the image of a nanoscale structure can be “characterised” or viewed with scanning electron microscopes (SEM) in the SEM Characterisation Laboratory.
Researchers and staff from the HiFES programme also had the chance to engage with Mr Teo, sharing about their projects and research experiences.